ASML’s $400M chipmaking machine just shipped its first laptop processors

Intel Foundry has started high-volume production of some Core Ultra Series 3 chips, code-named Panther Lake, using ASML's $400 million High NA EUV lithography machine. This marks the first commercial use of High NA EUV in volume logic chip manufacturing, accelerating its deployment ahead of the originally planned 14A node. The High NA tool enables higher resolution patterning, reducing the need for multiple patterning steps and improving efficiency, though the layers patterned are dual-qualified